Electromechanical Measurements Of Gd-Doped Ceria Thin Films By Laser Interferometry


Highly sensitive laser interferometer was built to measure electromechanical coupling in Gd-doped ceria Ce0.9Gd0.1O2-x thin films in the frequency range up to 20 kHz. Spurious resonances due to substrate bending were avoided by the special mounting of the film in the center of substrate. Compact design allowed to reach high vertical resolution of about 0.2 pm. Electrostriction coefficient measured in 1 µm thick Ce0.9Gd0.1O2-x film was 4.3×10-21 m2/V2 and slightly decreased with frequency till the extensional resonance of the substrate at about 20 kHz occurred. As expected, the displacement varied as a square of applied voltage without any sign of saturation.

[1] R. Korobko, A. Patlolla, A. Kossoy, E. Wachtel, H. L. Tuller, A. I. Frenkel, and I. Lubomirsky, Giant electrostriction in Gd-doped ceria, Advanced Materials, 24, no. 43, 5857–5861, (2012).

[2] R. Korobko, E. Wachtel, and I. Lubomirsky, Cantilever resonator based on the electrostriction effect in Gd-doped ceria, Sensors and Actuators, A: Physical, 201, 73–78, (2013).

[3] R. Korobko, C.-T. Chen, S. Kim, S. R. Cohen, E. Wachtel, N. Yavo, and I. Lubomirsky, Influence of Gd content on the room temperature mechanical properties of Gd-doped ceria, Scripta Materialia, 66, no. 3-4, 155–158, (2012).

[4] N. Yavo, D. Noiman, E. Wachtel, S. Kim, Y. Feldman, and I. Lubomirsky, Yeheskel O: Elastic moduli of pure and gadolinium doped ceria revisited: Sound velocity measurements. Scripta Materialia, 86 89, 123, 2016.

[5] Q. M. Zhang, W. Y. Pan, and L. E. Cross, Laser interferometer for the study of piezoelectric and electrostrictive strains, Journal of Applied Physics, 63, no. 8, 2492–2496, (1988).

[6] A. L. Kholkin, C. Wütchrich, D. V. Taylor, and N. Setter, Interferometric measurements of electric fieldinduced displacements in piezoelectric thin films, Review of Scientific Instruments, 67, no. 5, 1935–1941,(1996).

[7] R. Yimnirun, P. J. Moses, J. Meyer, and R. E. Newnham, A single-beam interferometer with subångström displacement resolution for electrostriction measurements, Measurement Science and Technology, 14, no. 6, 766–772, (2003).

[8] B. Jaffe, WR. Cook Jr, and H. Jaffe, Piezoelectric Ceramics, Academic Press, New York, 1971.

[9] GG. Stoney, The tensions of metallic films deposited by electrolysis, in The tensions of metallic films deposited by electrolysis. Proc. R. Soc. Land, A82–172, 172-175, A82, 1909.