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Veselov, D. S., Voronov, Y. A., & Shaltaeva, Y. R. (2018). Investigation of Solid Precipitate that Prevents Etching of Silicon in a Solution of Ethylenediamine and Pyrocatechol. KnE Engineering, 3(6), 380–384. https://doi.org/10.18502/keg.v3i6.3018

https://doi.org/10.18502/keg.v3i6.3018

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  • D S Veselov
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  • Y A Voronov
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  • Y R Shaltaeva
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Published Date

  • Oct 8, 2018

Investigation of Solid Precipitate that Prevents Etching of Silicon in a Solution of Ethylenediamine and Pyrocatechol

KnE Engineering / Breakthrough directions of scientific research at MEPhI: Development prospects within the Strategic Academic Units / Pages 380–384

Abstract

The article studies effect of solid precipitate building up that prevents etching of silicon in a solution of ethylenediamine and pyrocatechol. The article provides technology recommendations that allow avoiding the formation of the undesirable solid precipitate.

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