Measurement of Low Concentrations of Hydrogen in Oxygen By Using Sensors Based on MIS-structures
Abstract
It is shown that the possibility of using MIS-sensors as sensitive elements of gas analyzers for monitoring the concentration of hydrogen in the range of 5–10−5... 1% in oxygen. The article reports on the possibility of measuring low concentrations of hydrogen (0.5... 10 ppm) in oxygen using a MIS-sensor (metalinsulator-semiconductor).
References
[1] Hamburg, D. Yu. and Dubovkin, N. F. (eds.) (1989). Hydrogen Properties, Reception, Storage, Transportation, Application, p. 672. M.: Chemistry (in Russian).
[2] Nikolaev, I. N., Litvinov, A. V., and Emelin, E. V. (2007). The possibility of using MISsensors as sensing elements in gas analyzers. Sensors and Systems, no. 5, p. 66 (in Russian).
[3] Haoshuang, G., Zhao, W., and Yongming, H. (2012). Hydrogen gas sensors based on semiconductor oxide nanostructures. Sensors, vol. 12, pp. 5517–5550. DOI:10.3390/s120505517
[4] Emelin, E. V. and Nikolaev, I. N. (2006). The sensitivity of MIS-sensors to hydrogen, hydrogen sulfide and nitrogen dioxide in various gas environments. The Measuring Technique, no. 5, p. 68 (in Russian).
[5] Emelin, E. V., Zharkovsky, А. Е., and Nikolaev, I. N. (2006). The effect of humidity on the characteristics of MIS-sensors. The Sensor, no. 3, p. 15 (in Russian).