Application of Laser Radiation for Fabrication of Micromechanical Actuator Based on Two-Way Shape Memory Effect


The work deals with production and research of experimental samples of micromechanical actuator based on the rapidly quenched TiNiCu alloy, in which a two-way shape memory effect is formed as result of impact of the laser radiation. By the technique of focused ion beams an element with thickness of 5 microns, width of 7 microns and 100 microns in length was obtained, bending reversibly to 2.5 microns in the heating-cooling cycle.

Keywords: shape-memory alloy, thin ribbon, two-way shape memory effect, laser treatment, micromechanical actuator

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