Mileshin, S A, T A Tsivinskaya, and N A Sergeeva. “Microelectromechanical Sensors and Microstructures in Aerospace Applications”. KnE Engineering 3, no. 6 (October 8, 2018): 336–343. Accessed May 2, 2024. https://knepublishing.com/index.php/KnE-Engineering/article/view/3012.