Kozlova, T.I., Vasilyev, O.S., Borisyuk, P.V. and Lebedinskii, Y.Y. 2018. Formation and Study of Properties of Ta and Mo Nanocluster Films. KnE Engineering. 3, 6 (Oct. 2018), 296–304. DOI:https://doi.org/10.18502/keg.v3i6.3007.