Antonenko SV, Derzhavin SI, Klimentov SM. Preparation of Silcon Nanoparticles and Films By Pulsed Laser Deposition. KEn [Internet]. 2018Apr.17 [cited 2019Oct.20];3(2):29–31. Available from: https://knepublishing.com/index.php/KnE-Energy/article/view/1788