TY - JOUR AU - P Zolotov AU - A Divochiy AU - Y Vakhtomin AU - V Seleznev AU - P Morozov AU - K Smirnov PY - 2018/04/25 Y2 - 2024/03/29 TI - Superconducting Single-photon Detectors Made of Ultra-thin VN Films JF - KnE Energy JA - KEn VL - 3 IS - 3 SE - Articles DO - 10.18502/ken.v3i3.2016 UR - https://knepublishing.com/index.php/KnE-Energy/article/view/2016 AB - We optimized technology of thin VN films deposition in order to study VN-based superconducting single-photon detectors. Investigation of the main VN film parameters showed that this material has lower resistivity compared to commonly used NbN. Fabricated from obtained films devices showed 100% intrinsic detection efficiency at 900 nm, at the temperature of 1.7 K starting with the bias current of 0.7·I ER -